I. Cooling Water Anomaly

　　1. Confirm that the heating power has been stopped.

　　2. If there is a water leak outside the furnace and the cooling water volume is abnormal, emergency measures should be taken as soon as possible. If the water volume can be ensured, please continue to maintain the vacuum. If emergency measures cannot be taken, maintain the original state and confirm that the equipment has cooled down.

　　3. When a cooling water anomaly occurs and the equipment is stopped, immediately connect the emergency cooling water.

　　4. At high temperatures (above 200℃ is considered high temperature), if the cooling water stops and emergency water supply is not possible, the water-cooled electrode, heat exchanger, vacuum chamber shell, and various pumps may be damaged.

　　 II. Compressed Air Stoppage

　　1. When a compressed air anomaly alarm occurs and the equipment is stopped, go to the backup compressor room as soon as possible to restore operation.

　　2. If a compressed air anomaly alarm occurs in a vacuum and restoration takes a long time, terminate the vacuum and stop the equipment.

　　 III. Power Failure

　　1. In case of power failure and water interruption, immediately connect the backup cooling water and water source.

　　2. If it is not during heating, heating, or cooling, and restoration can be achieved quickly, restart the equipment and continue operation. If it takes a long time, keep the equipment in its original state.

　　3. If heating and cooling are in progress and restoration can be achieved quickly, restart the equipment. If it takes a long time, maintain the original state and allow the equipment to cool down naturally.

　　 IV. Heating Power Failure

　　1. Low water pressure: When the water pressure is below 0.15 MPa, the pressure gauge alarms.

　　2. Ground fault.

　　3. Vacuum discharge: The water-cooled electrode connector and the heater connection must be firmly connected, and the insulation from the reflector must be good.

　　4. If the furnace pressure is 13.3-66.5 Pa (this vacuum degree is prone to discharge), and a power failure occurs, the cause of the power failure can be considered to be discharge due to dielectric breakdown.

　　 V. Filling Gas (Argon or Nitrogen) Stoppage

　　1. Before the start of vacuum pumping, if the gas filling time is long or cannot be filled, please confirm whether the gas pipeline is blocked.

　　2. If there is no problem with the gas pipeline, check the action of the solenoid valve and the gas filling valve. For safety reasons, all related equipment should be stopped before inspection.

　　3. If the gas cannot be stopped from filling into the vacuum chamber, and the pressure relief valve is activated, close the gas supply valve and all gas systems, including the piping.

　　4. Confirm whether there are any gas leaks in the gas filling piping, as this will affect product quality.

　　 VI. Vacuum Chamber Pressure Deterioration

　　1. If the vacuum exhaust time is longer than usual, the equipment should be stopped for inspection. Depending on the different states of the structures in the vacuum chamber, the influence of exhaust can also lead to pressure increase.

　　2. Confirm whether it is a gas leak or the influence of exhaust through a pressure rise test or helium leak detection.

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